Download Fundamental Principles of Optical Lithography book
Book format: pdf, android, epub, ebook, ipad, audio, text
Amount: 3.00 MB
Date: 23.08.2012
Authоr: Mack, Chris
ISBN: 80470723869
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories.
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li·thog·ra·phy (l-th g r-f) n. A printing process in which the image to be printed is rendered on a flat surface, as on sheet zinc or aluminum, and treated to
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Fundamental Principles of Optical Lithography
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Photolithography, also termed optical lithography or UV lithography, is a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate.
In quantum mechanics, the uncertainty principle is any of a variety of mathematical inequalities asserting a fundamental limit to the precision with which certain
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